Optimizing mechanical properties in single-layered and multi-layered amorphous carbon coatings

Hydrogenated amorphous carbon coatings improve mechanical performance characteristics on a variety of substrates, resulting in widespread industry applications requiring combination high hardness, low coefficient friction, wear resistance, elasticity, and adhesion. However, such properties is difficult to achieve. We investigated the structure, scratch behavior single-layered multilayered thin films made by plasma immersion ion implantation-based enhanced chemical vapor deposition. The elastic modulus hardness were improved up 149 GPa 17 respectively varying applied bias voltage pulse width. observed non-equivalent impact coating structure based whether width or frequency varied duty cycle range 1–12.5%. Mechanical independent within experimental uncertainty. All showed exceptional recovery ~70%. Film microstructures as measured Raman microscopy that maxima modulus/hardness function correlated with highest sp3 bonding fraction, sp2 disorder, overall lowest disorder. intermediate fraction but disorder was nearly unchanged. Based single-layer results, multilayers developed. Nanoindentation testing while multilayering preserved friction irrespective recipe, volume strongly hardness.